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    What are the effects of new technologies such as copper on the design rule shrink?

  1. It sounds like the question is "Are we going to continue to shrink our dies"? The answer is yes, be it copper or some other technology. I did a small research survey to find out the effect of die shrinks and new technology on die yield because I was hoping die yields would start to go to hell at some point in the future. I talked to more than 15 engineers, I'm not sure how many. The conclusion, there is no way they are going to give up yield. They will buy equipment that will give them the yield they need. They are going to continue to shrink die. Whether they use copper or some other technology, that's up to you the equipment people.
  2. I totally agree. Copper is probably one of the enabling technologies for shrink.